Portuguese National Electron Microscopy Network

 

Ultra-high resolution field-emission Scanning Electron Microscope, with integrated microanalysis X-ray system (EDS - energy dispersive spectrometer) and Electron Backscatter Diffraction (EBSD)

 

Type of analysis:

The microscope allows the analysis of conductive, semiconductive and nonconductive samples including any type of polymer, metal, ceramic or organic material.

This ultra-high resolution microscope (<1.8 nm both at high and low vacuum) is particularly developed for the study and characterization of nanomaterials such as: diamond coatings, thin films; carbon nanotubes, nanoparticles, semiconductors, polymers, porous materials, glass substrates, organic materials, among others.

Additionally, the Nova NanoSEM 200 possess unique ultra-high resolution characterization capabilities in low vacuum, an environment that suppresses the charge on non-conducting materials or components and cancels self-contamination of the sample or contamination induced by the electron beam. Thus, it is especially designed for the analysis of charged and/or contaminated samples. This charge elimination also removes the need for applying conductive coatings that can obscure the image details and interfere with the compositional analysis.

With the integrated X-ray microanalysis (EDS) and the electron backscatter diffraction pattern detection and analysis system (EBSD), it is possible to perform acquisition and analysis of X-ray spectra from B to U. Additionally, we can obtain X-ray profiles maps by elements and perform sequence analysis of particles and regions in a sample. The EBSD system, allows the record and analysis of the backscattered electron diffraction patterns in a point or in a specific region of the sample.

 

Technical Specifications:

Integrated system (EDS - energy dispersive spectrometer /EBSD - Electron Backscatter Diffraction), EDAX- Pegasus X4M

High vacuum resolution

• 1.8 nm at 1 kV (SE)
• 1.0 nm at 15 kV (SE)

Low vacuum resolution

• 1.8 nm at 3 kV (Helix detector)
• 1.5 nm at 10 kV (Helix detector)

Electron beam resolution

• 0.8 nm at 30 kV (STEM)

Beam landing energy: 200V to 30 kV
 

High stability Schottky field emission gun with automatic operation

Probe current: 0.3 pA to 22 nA, continuously adjustable

Chamber vacuum (high vacuum): <10-4 mBar

Chamber vacuum (low vacuum): <2 mBar

 

Detectors:

• Through-lens (TLD) (high vacuum) (SE and BSE mode);
• Everhardt Thornley (ETD) (high vacuum) (SE and BSE mode);
• Low Vacuum (LVD) (SE and BSE mode);
• Backscattered Electron Detector (BSED) (high vacuum) (BSE mode);
• Scanning transmitted electron microscopy (STEM) (transmitted electrons mode);
• Infrared CCD camera (CCD) (high and low vacuum) (light mode and infrared).

Chamber:

• 284 mm diameter (left to right) and 8 ports;
• Eucentric goniometer stage, 4 axis motorized;
• X,Y = 50 mm, Z = 50 mm;
• Tilt = -15º - +75° (depending on WD);
• Rotation = 360° continuous.

Image processor resolution:

• Up to 3584 x 3094 pixels

Pattern processor resolution:

• Up to 4000 x 4000 pixels
• File type: TIFF (8 or 16 bit), BMP or JPEG

Operation control:

• Single frame or 4.quad image display (real time or memory based)

 

Integrated Energy Dispersive Spectrometer (EDS) and Electron Backscatter Diffraction pattern (EBSD), EDAX- Pegasus X4M

 

 EDS Specifications

• Si (Li) detector - SEM ultra-thin window (SUTW) type;

• Qualitative and quantitative acquisition and analysis of X-ray spectra (B-U) - with ZAF and FIROZ correction matrix;

• Digital capture of SEM images and selection of the analysis point/region;

• X-ray profiles maps by elements, full and quantitative spectrum;

• Automated acquisition of X-ray maps into multiple regions;

• Automated sequential analysis of multiple particles and regions/fields.

 

EBSD Specifications

• EBSD detection unit with DigiView III camera and “Forward Scatter Detector System” detector;

• Software for recording and analysis of the backscattered electron diffraction patterns in a point or in a specific region of the sample;

• Software for recording, processing and analysis of IOM;

• "Delphi Software" for phase identification, matching results of EDS and EBSD analysis (ICDD database- Version Academic).

 

 

 

The Managing and Financing Entity of the National Scientific Re-equipment Program(PNRC):
FCTFCT - Foundation for Science and Technology
Project REDE/1511/RME/2005

 

NanoSEM -  FEI Nova 200 (FEG/SEM); EDAX - Pegasus X4M (EDS/EBSD)